HfxAlyO ternary dielectrics for InGaAs based metal-oxide-semiconductor capacitors
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Title
HfxAlyO ternary dielectrics for InGaAs based metal-oxide-semiconductor capacitors
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 3, Pages 034505
Publisher
AIP Publishing
Online
2017-07-20
DOI
10.1063/1.4993905
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