Gas-assisted focused electron beam and ion beam processing and fabrication

Published 2008 View Full Article

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Title
Gas-assisted focused electron beam and ion beam processing and fabrication
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 4, Pages 1197
Publisher
American Vacuum Society
Online
2008-08-22
DOI
10.1116/1.2955728
References
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