Low-temperature, site selective graphitization of SiC via ion implantation and pulsed laser annealing
Published 2012 View Full Article
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Title
Low-temperature, site selective graphitization of SiC via ion implantation and pulsed laser annealing
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 19, Pages 193105
Publisher
AIP Publishing
Online
2012-05-09
DOI
10.1063/1.4707383
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