Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2367-2373Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2990789
Keywords
atomic force microscopy; cantilevers; lithography; microactuators; piezoresistive devices
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Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.
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