Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition

Title
Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 22, Pages 225305
Publisher
IOP Publishing
Online
2008-04-26
DOI
10.1088/0957-4484/19/22/225305

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