4.5 Article

Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

Journal

MICROSCOPY AND MICROANALYSIS
Volume 19, Issue S2, Pages 862-863

Publisher

Cambridge University Press (CUP)
DOI: 10.1017/s1431927613006302

Keywords

-

Ask authors/readers for more resources

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.5
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available