Electrochemical nanoimprint lithography: when nanoimprint lithography meets metal assisted chemical etching

Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer

(2017) Jie Zhang et al.   Chemical Science

Direct Imprinting of Liquid Silicon

(2016) Takashi Masuda et al.   ACS Applied Materials & Interfaces

Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

(2016) Ruby A. Lai et al.   ACS Applied Materials & Interfaces

Direct Imprinting of Porous Silicon via Metal-Assisted Chemical Etching

(2016) Bruno P. Azeredo et al.   ADVANCED FUNCTIONAL MATERIALS

Fabrication of microlens array on silicon surface using electrochemical wet stamping technique

(2016) Lei-Jie Lai et al.   APPLIED SURFACE SCIENCE

Broad-band three dimensional nanocave ZnO thin film photodetectors enhanced by Au surface plasmon resonance

(2016) Mengwei Sun et al.   Nanoscale

3D periodic multiscale TiO2architecture: a platform decorated with graphene quantum dots for enhanced photoelectrochemical water splitting

(2016) Zhen Xu et al.   NANOTECHNOLOGY

Nanoimprint technology for patterning functional materials and its applications

(2015) Chen-Chieh Yu et al.   MICROELECTRONIC ENGINEERING

Metal-assisted chemical etching of silicon and the behavior of nanoscale silicon materials as Li-ion battery anodes

(2015) William McSweeney et al.   Nano Research

Electron transfer during metal-assisted and stain etching of silicon

(2015) Kurt W Kolasinski   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Versatile control of metal-assisted chemical etching for vertical silicon microwire arrays and their photovoltaic applications

(2015) Han-Don Um et al.   Scientific Reports

Deep Etching of Single- and Polycrystalline Silicon with High Speed, High Aspect Ratio, High Uniformity, and 3D Complexity by Electric Bias-Attenuated Metal-Assisted Chemical Etching (EMaCE)

(2014) Liyi Li et al.   ACS Applied Materials & Interfaces

Mechanistic Characteristics of Metal-Assisted Chemical Etching in GaAs

(2014) Ho-Yuen Cheung et al.   Journal of Physical Chemistry C

Tunneling Ultramicroelectrode: Nanoelectrodes and Nanoparticle Collisions

(2014) Jiyeon Kim et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Recent progress in low temperature nanoimprint lithography

(2014) Hongwen Sun   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Metal-assisted chemical etching of silicon and nanotechnology applications

(2014) Hee Han et al.   Nano Today

Bulk Micromachining of Si by Metal-assisted Chemical Etching

(2014) Sang-Mi Kim et al.   Small

Hierarchical silicon nanostructured arrays via metal-assisted chemical etching

(2014) Hao Lin et al.   RSC Advances

Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts

(2013) Liyi Li et al.   ACS Applied Materials & Interfaces

Decoupling Diameter and Pitch in Silicon Nanowire Arrays Made by Metal-Assisted Chemical Etching

(2013) Junghoon Yeom et al.   ADVANCED FUNCTIONAL MATERIALS

Fabrication of microstructures on GaAs with pulsed electrochemical wet stamping

(2013) Hang Zhou et al.   ELECTROCHIMICA ACTA

GaAs pillar array-based light emitting diodes fabricated by metal-assisted chemical etching

(2013) Parsian K. Mohseni et al.   JOURNAL OF APPLIED PHYSICS

Multiscale Transfer Printing into Recessed Microwells and on Curved Surfaces via Hierarchical Perfluoropolyether Stamps

(2013) Hyunchul Park et al.   Small

Metal hierarchical patterning by direct nanoimprint lithography

(2013) Boya Radha et al.   Scientific Reports

Nanostructured TiO2diffraction grating fabricated via imprinting and TiCl4treatment

(2013) Jeeyoung Lee et al.   Journal of Materials Chemistry C

3D Spirals with Controlled Chirality Fabricated Using Metal-Assisted Chemical Etching of Silicon

(2012) Owen J. Hildreth et al.   ACS Nano

Direct Patterning of Engineered Ionic Gold Nanoparticles via Nanoimprint Lithography

(2012) Xi Yu et al.   ADVANCED MATERIALS

Magnetically Guided Nano–Micro Shaping and Slicing of Silicon

(2012) Young Oh et al.   NANO LETTERS

Au/Ag Bilayered Metal Mesh as a Si Etching Catalyst for Controlled Fabrication of Si Nanowires

(2011) Jungkil Kim et al.   ACS Nano

Wafer-Scale High-Throughput Ordered Arrays of Si and Coaxial Si/Si1–xGex Wires: Fabrication, Characterization, and Photovoltaic Application

(2011) Caofeng Pan et al.   ACS Nano

3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

(2011) Owen J. Hildreth et al.   ADVANCED FUNCTIONAL MATERIALS

Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics

(2011) Xiuling Li   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

Technology review and assessment of nanoimprint lithography for semiconductor and patterned media manufacturing

(2011) Matt Malloy   Journal of Micro-Nanolithography MEMS and MOEMS

Fabrication of high-aspect-ratio microstructures using dielectrophoresis-electrocapillary force-driven UV-imprinting

(2011) Xiangming Li et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Formation of High Aspect Ratio GaAs Nanostructures with Metal-Assisted Chemical Etching

(2011) Matt DeJarld et al.   NANO LETTERS

Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon

(2010) Konrad Rykaczewski et al.   ADVANCED MATERIALS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

High-Performance Silicon Nanohole Solar Cells

(2010) Kui-Qing Peng et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Direct nanoprinting by liquid-bridge-mediated nanotransfer moulding

(2010) Jae K. Hwang et al.   Nature Nanotechnology

Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

(2009) Se Hyun Ahn et al.   ACS Nano

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

(2009) Elizabeth A. Costner et al.   Annual Review of Materials Research

Site-Selective Metal Patterning/Metal-Assisted Chemical Etching on GaAs Substrate Through Colloidal Crystal Templating

(2009) Yukiko Yasukawa et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

UV-assisted capillary force lithography for engineering biomimetic multiscale hierarchical structures: From lotus leaf to gecko foot hairs

(2009) Hoon Eui Jeong et al.   Nanoscale

Ultrafast direct imprinting of nanostructures in metals by pulsed laser melting

(2009) Bo Cui et al.   NANOTECHNOLOGY

Cu micropatterning on n-Si(111) by selective electrochemical deposition using an agarose stamp

(2008) Jing Tang et al.   ELECTROCHIMICA ACTA

Enhanced thermoelectric performance of rough silicon nanowires

(2008) Allon I. Hochbaum et al.   NATURE