Recent progress in low temperature nanoimprint lithography

Low-temperature thermal nanoimprint lithography of anti-reflective structures for flexible low band gap organic solar cells

(2013) J Kettle et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification

(2013) Andrew I.M. Greer et al.   MICROELECTRONIC ENGINEERING

Double patterning in nanoimprint lithography

(2013) Makoto Okada et al.   MICROELECTRONIC ENGINEERING

Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography

(2013) Keita Yajima et al.   MICROELECTRONIC ENGINEERING

Reduction of pattern peeling in step-and-flash imprint lithography

(2013) Satoshi Takei et al.   MICROELECTRONIC ENGINEERING

Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography

(2012) Fang Jiao et al.   MICROELECTRONIC ENGINEERING

Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

(2011) Alborz Amirsadeghi et al.   APPLIED SURFACE SCIENCE

Direct patterning on side chain crystalline polymer by thermal nanoimprinting using mold without antisticking layer

(2011) Makoto Okada et al.   MICROELECTRONIC ENGINEERING

Fabrication of a nano-scale embedded metal electrode in flexible films by UV/thermal nanoimprint lithography tools

(2011) S.Y. Park et al.   MICROELECTRONIC ENGINEERING

High density phase change data on flexible substrates by thermal curing type nanoimprint lithography

(2011) Sung-Hoon Hong et al.   MICROELECTRONIC ENGINEERING

Enhancement of light polarization from electrospun polymer fibers by room temperature nanoimprint lithography

(2010) Stefano Pagliara et al.   NANOTECHNOLOGY

Fabrication of planar organic nanotransistors using low temperature thermal nanoimprint lithography for chemical sensor applications

(2010) J Kettle et al.   NANOTECHNOLOGY

Fabrication of a flexible multi-referenced surface plasmon sensor using room temperature nanoimprint lithography

(2009) John P. Hulme et al.   CURRENT APPLIED PHYSICS

Cross-sectional observation of nanoimprint resins filled in SiO2/Si mold pattern using scanning electron microscopy

(2009) Makoto Okada et al.   MICROELECTRONIC ENGINEERING

Replication of cancer cells using soft lithography bioimprint technique

(2009) Fahmi Samsuri et al.   MICROELECTRONIC ENGINEERING

High-performing submicron organic thin-film transistors fabricated by residue-free embossing

(2009) Christoph Auner et al.   ORGANIC ELECTRONICS

Room Temperature Nanoimprint Lithography Using Molds Fabricated by Molecular Beam Epitaxy

(2008) S. Harrer et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Ultrasonic Nanoimprint on Poly(ethylene terephthalate) at Room Temperature

(2008) Harutaka Mekaru et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Finite element analysis of low temperature thermal nanoimprint lithography using a viscoelastic model

(2008) Nam Woong Kim et al.   MICROELECTRONIC ENGINEERING

A photo-polymerization resist for UV nanoimprint lithography

(2008) Chun-Chang Wu et al.   MICROELECTRONIC ENGINEERING

mr-NIL 6000LT – Epoxy-based curing resist for combined thermal and UV nanoimprint lithography below 50°C

(2008) Christine Schuster et al.   MICROELECTRONIC ENGINEERING