Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

Published 2009 View Full Article

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Title
Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures
Authors
Keywords
-
Journal
ACS Nano
Volume 3, Issue 12, Pages 4033-4042
Publisher
American Chemical Society (ACS)
Online
2009-12-02
DOI
10.1021/nn901174e

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