Metal-assisted chemical etching of silicon and nanotechnology applications

Published 2014 View Full Article

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Title
Metal-assisted chemical etching of silicon and nanotechnology applications
Authors
Keywords
-
Journal
Nano Today
Volume 9, Issue 3, Pages 271-304
Publisher
Elsevier BV
Online
2014-05-25
DOI
10.1016/j.nantod.2014.04.013

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