3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon

(2010) Konrad Rykaczewski et al.   ACS Applied Materials & Interfaces

Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon

(2010) Konrad Rykaczewski et al.   ADVANCED MATERIALS

Curving Nanostructures Using Extrinsic Stress

(2010) Jeong-Hyun Cho et al.   ADVANCED MATERIALS

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

Wafer-Scale Synthesis of Single-Crystal Zigzag Silicon Nanowire Arrays with Controlled Turning Angles

(2010) Huan Chen et al.   NANO LETTERS

Three-Dimensional Fabrication at Small Size Scales

(2010) Timothy G. Leong et al.   Small

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Self-Assembly of Lithographically Patterned Nanoparticles

(2009) Jeong-Hyun Cho et al.   NANO LETTERS

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA

Preparation of Large-Area Uniform Silicon Nanowires Arrays through Metal-Assisted Chemical Etching

(2008) Ming-Liang Zhang et al.   Journal of Physical Chemistry C

Superhydrophobic and Low Light Reflectivity Silicon Surfaces Fabricated by Hierarchical Etching

(2008) Yonghao Xiu et al.   LANGMUIR

Extended Arrays of Vertically Aligned Sub-10 nm Diameter [100] Si Nanowires by Metal-Assisted Chemical Etching

(2008) Zhipeng Huang et al.   NANO LETTERS