Mechanistic Characteristics of Metal-Assisted Chemical Etching in GaAs

Title
Mechanistic Characteristics of Metal-Assisted Chemical Etching in GaAs
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 118, Issue 13, Pages 6903-6908
Publisher
American Chemical Society (ACS)
Online
2014-03-15
DOI
10.1021/jp500968p

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