Tunable band alignment and dielectric constant of solution route fabricated Al/HfO2/Si gate stack for CMOS applications
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Title
Tunable band alignment and dielectric constant of solution route fabricated Al/HfO2/Si gate stack for CMOS applications
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 8, Pages 085301
Publisher
AIP Publishing
Online
2017-02-24
DOI
10.1063/1.4977007
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