Tunable dielectric properties of TiO 2 thin film based MOS systems for application in microelectronics

Title
Tunable dielectric properties of TiO 2 thin film based MOS systems for application in microelectronics
Authors
Keywords
-
Journal
SUPERLATTICES AND MICROSTRUCTURES
Volume 100, Issue -, Pages 876-885
Publisher
Elsevier BV
Online
2016-10-20
DOI
10.1016/j.spmi.2016.10.054

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