High-K materials and metal gates for CMOS applications

Title
High-K materials and metal gates for CMOS applications
Authors
Keywords
High K oxide, Gate oxide, HfO, 2, Field effect transistor, CMOS
Journal
MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume 88, Issue -, Pages 1-41
Publisher
Elsevier BV
Online
2014-12-10
DOI
10.1016/j.mser.2014.11.001

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