Microstructure, optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high- k HfO 2 gate dielectrics

Published 2016 View Full Article

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Title
Microstructure, optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high- k HfO 2 gate dielectrics
Authors
Keywords
High-, k, gate dielectrics, Sol–gel, Electrical properties, Leakage current transport mechanism, Optical properties
Journal
CERAMICS INTERNATIONAL
Volume 42, Issue 6, Pages 6761-6769
Publisher
Elsevier BV
Online
2016-01-15
DOI
10.1016/j.ceramint.2016.01.050

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