Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-κ gate dielectrics
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Title
Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-κ gate dielectrics
Authors
Keywords
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Journal
RSC Advances
Volume 6, Issue 20, Pages 16301-16307
Publisher
Royal Society of Chemistry (RSC)
Online
2016-01-29
DOI
10.1039/c5ra26860e
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