Structure–property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition

Structural and optical characterization of low-temperature ALD crystalline AlN

(2015) P. Motamedi et al.   JOURNAL OF CRYSTAL GROWTH

A route to low temperature growth of single crystal GaN on sapphire

(2015) Pouyan Motamedi et al.   Journal of Materials Chemistry C

Effect of growth temperature on the epitaxial growth of ZnO on GaN by ALD

(2014) Suvi Särkijärvi et al.   JOURNAL OF CRYSTAL GROWTH

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1−xN thin films at low temperatures

(2014) Cagla Ozgit-Akgun et al.   Journal of Materials Chemistry C

Refractive index of SnS thin nano-crystalline films

(2013) Amit Jakhar et al.   SOLID STATE COMMUNICATIONS

Influence of growth temperature on the electrical and structural characteristics of conductive Al-doped ZnO thin films grown by atomic layer deposition

(2013) Cheol Hyoun Ahn et al.   THIN SOLID FILMS

The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method

(2012) N.Y. Yuan et al.   JOURNAL OF CRYSTAL GROWTH

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

(2012) Jaesang Lee et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Achieving chemical stability in thermoelectric NaxCoO2 thin films

(2012) P. Brinks et al.   RSC Advances

Electronic-grade GaN(0001)/Al2O3(0001) grown by reactive DC-magnetron sputter epitaxy using a liquid Ga target

(2011) M. Junaid et al.   APPLIED PHYSICS LETTERS

In Situ Spectroscopic Ellipsometry Study of Plasma-Enhanced ALD of Al2O3on Chromium Substrates

(2011) Ali Foroughi-Abari et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic layer deposition of GaN at low temperatures

(2011) Cagla Ozgit et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Electronic structure and morphological study of BaTiO3 film grown by pulsed-laser deposition

(2011) Kaveh Ahadi et al.   MATERIALS LETTERS

Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition

(2011) P.J. King et al.   THIN SOLID FILMS

Epitaxial Growth of Nanostructured Gold Films on Germanium via Galvanic Displacement

(2010) Sayed Y. Sayed et al.   ACS Applied Materials & Interfaces

Schottky barrier height behavior of Pt–Ru alloy contacts on single-crystal n-ZnO

(2010) T. Nagata et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Atomic layer deposition of GaN using GaCl3 and NH3

(2009) Oh Hyun Kim et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Buffer optimization for crack-free GaN epitaxial layers grown on Si(1 1 1) substrate by MOCVD

(2008) Engin Arslan et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Influence of substrate temperature and Zn-precursors on atomic layer deposition of polycrystalline ZnO films on glass

(2008) Hisao Makino et al.   THIN SOLID FILMS