Ultra-thin Al2O3 films grown by atomic layer deposition for corrosion protection of copper
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Title
Ultra-thin Al2O3 films grown by atomic layer deposition for corrosion protection of copper
Authors
Keywords
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Journal
RSC Advances
Volume 4, Issue 92, Pages 50503-50509
Publisher
Royal Society of Chemistry (RSC)
Online
2014-10-01
DOI
10.1039/c4ra09179e
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