Extremely scaled high-k/In0.53Ga0.47As gate stacks with low leakage and low interface trap densities
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Title
Extremely scaled high-k/In0.53Ga0.47As gate stacks with low leakage and low interface trap densities
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 116, Issue 12, Pages 124104
Publisher
AIP Publishing
Online
2014-09-25
DOI
10.1063/1.4896494
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Related references
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