Surface and subsurface integrity of monocrystalline silicon in impulse-discharge driven abrasive machining

Experimental and theoretical investigation on the ductile removal mechanism in in-situ laser assisted diamond cutting of fused silica

(2023) Chuangting Lin et al.   Journal of Materials Research and Technology-JMR&T

Numerical and experimental investigations on NANO-SIO2 jet polishing efficiency by different nozzle structures

(2022) Shuo Qiao et al.   CERAMICS INTERNATIONAL

The material removal and surface generation mechanism in ultra-precision grinding of silicon wafers

(2022) Hongfei Tao et al.   INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES

Nano-grinding process of single-crystal silicon using molecular dynamics simulation: Nano-grinding parameters effect

(2022) Pengyue Zhao et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

(2022) Xiaosheng Zhang et al.   NATURE

Origin and evolution of a crack in silicon induced by a single grain grinding

(2022) Zhenyu Zhang et al.   Journal of Manufacturing Processes

Light-induced activation of boron doping in hydrogenated amorphous silicon for over 25% efficiency silicon solar cells

(2022) Wenzhu Liu et al.   Nature Energy

MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics

(2022) Qifeng Qiao et al.   ACS Photonics

Grinding and lapping induced surface integrity of silicon wafers and its effect on chemical mechanical polishing

(2022) Shang Gao et al.   APPLIED SURFACE SCIENCE

An investigation of monitoring the damage mechanism in ultra-precision grinding of monocrystalline silicon based on AE signals processing

(2022) Sheng Wang et al.   Journal of Manufacturing Processes

Improving metal surface integrity by integrating mechanical stress fields during micron- and nano-abrasive machining

(2022) Zhaojie Chen et al.   INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES

Modeling of thermal damage and residual stress in slicing of silicon wafers using wire-electrical discharge machining: Comparison with experiments

(2022) Pinal Rana et al.   Journal of Manufacturing Processes

Synthesis and characterization of the rheological behavior of MR fluid for polishing silicon wafer using double-disc chemical-assisted magneto-rheological finishing process

(2021) Mayank Srivastava et al.   JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

A review on laser drilling and cutting of silicon

(2021) Hong-Jian Wang et al.   JOURNAL OF THE EUROPEAN CERAMIC SOCIETY

Micro electrical discharge milling of a monocrystalline silicon complex micro-cavity

(2021) Sirui Gong et al.   MATERIALS AND MANUFACTURING PROCESSES

Concerted effect of boron and porosity on shear thickening behavior of hybrid mesoporous silica dispersions

(2021) E. Islam et al.   Materials Today Chemistry

A novel Non-Newtonian fluid polishing technique for zirconia ceramics based on the weak magnetorheological strengthening thickening effect

(2021) Y. Ming et al.   CERAMICS INTERNATIONAL

Porous Silicon Preparation by Electrochemical Etching in Ionic Liquids

(2020) Evgeniya A. Saverina et al.   ACS Sustainable Chemistry & Engineering

High-Resolution Image Patterned Silicon Wafer with Inverted Pyramid Micro-Structure Arrays for Decorative Solar Cells

(2020) Ke Ding et al.   Materials Today Energy

Hybrid micro-grinding process for manufacturing meso/micro-structures on monocrystalline silicon

(2020) Wei Li et al.   MATERIALS AND MANUFACTURING PROCESSES

Electrochemical nanoimprinting of silicon

(2019) Aliaksandr Sharstniou et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process

(2019) Mohammad Mosavat et al.   WEAR

Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting

(2019) Zhanwen Sun et al.   Journal of Manufacturing Processes

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

(2019) Jun Zhao et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

On form accuracy and surface roughness in micro-ultrasonic machining of silicon microchannels

(2018) Dungali Sreehari et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Theoretical model and experimental analysis of chemical mechanical polishing with the effect of slurry for abrasive removal depth and surface morphology of silicon wafer

(2018) Zone-Ching Lin et al.   TRIBOLOGY INTERNATIONAL

Surface damage mechanism of monocrystalline silicon during single point diamond grinding

(2018) Quanli Zhang et al.   WEAR

Diamond cutting of micro-structure array on brittle material assisted by multi-ion implantation

(2018) Jinshi Wang et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Experimental investigations of a hybrid machining combining wire electrical discharge machining (WEDM) and fixed abrasive wire saw

(2017) Xiaoyu Wu et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

A gas-liquid-solid three-phase abrasive flow processing method based on bubble collapsing

(2017) Jiang-qin Ge et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Effects of the micro-structure of arc-shaped groove, rectangular groove and semicircle-based rectangular groove on the reflectance of silicon solar cell

(2017) Yuantai Wu et al.   SOLAR ENERGY

Evolution and equivalent control law of surface roughness in shear-thickening polishing

(2016) Min Li et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Effects of non-amorphizing hydrogen ion implantation on anisotropy in micro cutting of silicon

(2015) G.B. Xiao et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Study on axial-feed mirror finish grinding of hard and brittle materials in relation to micron-scale grain protrusion parameters

(2010) J. Xie et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE