Nano-grinding process of single-crystal silicon using molecular dynamics simulation: Nano-grinding parameters effect
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Title
Nano-grinding process of single-crystal silicon using molecular dynamics simulation: Nano-grinding parameters effect
Authors
Keywords
Nano-grinding, Surface generation, Subsurface damage, Phases transition, Internal stress, Molecular dynamics
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 143, Issue -, Pages 106531
Publisher
Elsevier BV
Online
2022-02-10
DOI
10.1016/j.mssp.2022.106531
References
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