Origin and evolution of a crack in silicon induced by a single grain grinding
Published 2022 View Full Article
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Title
Origin and evolution of a crack in silicon induced by a single grain grinding
Authors
Keywords
Crack, Si, Molecular dynamics, TEM, Median
Journal
Journal of Manufacturing Processes
Volume 75, Issue -, Pages 617-626
Publisher
Elsevier BV
Online
2022-01-25
DOI
10.1016/j.jmapro.2022.01.037
References
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