MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics
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Title
MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics
Authors
Keywords
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Journal
ACS Photonics
Volume 9, Issue 7, Pages 2367-2377
Publisher
American Chemical Society (ACS)
Online
2022-06-24
DOI
10.1021/acsphotonics.2c00381
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