Theoretical model and experimental analysis of chemical mechanical polishing with the effect of slurry for abrasive removal depth and surface morphology of silicon wafer

Title
Theoretical model and experimental analysis of chemical mechanical polishing with the effect of slurry for abrasive removal depth and surface morphology of silicon wafer
Authors
Keywords
-
Journal
TRIBOLOGY INTERNATIONAL
Volume 117, Issue -, Pages 119-130
Publisher
Elsevier BV
Online
2017-08-31
DOI
10.1016/j.triboint.2017.08.021

Ask authors/readers for more resources

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started