A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

Published 2019 View Full Article

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Title
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow
Authors
Keywords
-
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 61, Issue -, Pages 72-81
Publisher
Elsevier BV
Online
2019-10-03
DOI
10.1016/j.precisioneng.2019.10.002

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