Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting

Published 2019 View Full Article

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Title
Feasibility investigation on ductile machining of single-crystal silicon for deep micro-structures by ultra-precision fly cutting
Authors
Keywords
Ductile machining process, Micro-structures, Single-crystal silicon, Tool wear
Journal
Journal of Manufacturing Processes
Volume 45, Issue -, Pages 176-187
Publisher
Elsevier BV
Online
2019-07-10
DOI
10.1016/j.jmapro.2019.05.045

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