Effects of non-amorphizing hydrogen ion implantation on anisotropy in micro cutting of silicon

Published 2015 View Full Article

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Title
Effects of non-amorphizing hydrogen ion implantation on anisotropy in micro cutting of silicon
Authors
Keywords
Micro cutting, Silicon, Ion implantation, Ductile regime machining, Anisotropy
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 225, Issue -, Pages 439-450
Publisher
Elsevier BV
Online
2015-06-28
DOI
10.1016/j.jmatprotec.2015.06.017

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