Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators
Published 2016 View Full Article
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Title
Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators
Authors
Keywords
Partial Differential Equation, Beam Length, Output Displacement, Dynamic Cycle, Thin Beam
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 8, Pages 3775-3789
Publisher
Springer Nature
Online
2016-11-11
DOI
10.1007/s00542-016-3180-0
References
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