Article
Automation & Control Systems
Steven Moore, Yuen K. Yong, Meysam Omidbeike, Andrew J. Fleming
Summary: This article presents a monolithic nanopositioner with in-plane bending actuators that offer greater deflection but lower stiffness and resonance frequency compared to extension actuators. The XY nanopositioning stage with serial kinematic design achieves a 10 μm range in X and Y axes at +/-200 V, with a first resonance mode at 250 Hz in the Z axis. The stage is successfully demonstrated for atomic force microscopy imaging.
Article
Engineering, Mechanical
Peng-Zhi Li, De-Fu Zhang, Barry Lennox, Farshad Arvin
Summary: This paper investigates a novel 3-degree-of-freedom nanopositioner designed for accurate positioning of objects at the nanometer scale. The nanopositioner utilizes advanced technologies such as a flexure diaphragm guider and walking piezoelectric actuators. Experimental results demonstrate excellent performance in terms of positioning accuracy, coupling displacement, and dynamic response in the Z direction.
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
(2021)
Article
Automation & Control Systems
Wei Wei, Zhiyuan Zhang, Min Zuo
Summary: Hysteresis affects the accuracy of a piezoelectric nanopositioning system, leading to difficulties in maintaining satisfactory performance with inverse hysteresis model-based control. Linear active disturbance rejection control (LADRC) is a practical approach, but the phase lag of total disturbance estimation impacts its ability. By introducing a phase-leading extended state observer (PLESO), the system can compensate for total disturbance in a more timely manner, improving positioning accuracy.
Article
Automation & Control Systems
Yang Cao, Jingyan Dong
Summary: This article proposes a resistive self-sensing approach for soft electrothermal actuators to enable closed-loop control without external sensors. The self-sensing of actuator's deformation is achieved by measuring the resistance change of the embedded microfilament heater. A closed-loop controller was designed using the self-sensed deflection signal, with a switching proportional-integral-derivative control algorithm to handle different responses in the heating and cooling stages. The designed control algorithm showed significantly improved response speed, tracking accuracy, and disturbance rejection compared to open-loop operation.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2021)
Article
Mathematics
Guangwei Wang, Bo Wang, Chengxi Zhang
Summary: This paper introduces a novel third-order super-twisting-like integral sliding mode controller (3-ISMC) for trajectory tracking in nanopositioning applications. In contrast to traditional methods, this controller offers continuous control inputs to overcome chattering issues and ensure fixed-time convergence independently of initial conditions. Simulation results demonstrate that the proposed controller provides chattering-free and rapid transient response performance even under model uncertainties and external disturbances.
Article
Automation & Control Systems
Yixuan Meng, Xiangyuan Wang, Wei-Wei Huang, Linlin Li, Chuxiong Hu, XinQuan Zhang, LiMin Zhu
Summary: In this article, an intelligent feedforward prediction and compensation scheme combined with a dual-loop high-bandwidth controller is proposed for high-speed and high-precision tracking controls of a nanopositioning stage. The dual-loop controller, consisting of an inner loop damping and an outer loop tracking controller, is developed with optimized parameters to provide a control bandwidth over the first resonant frequency of the stage. The effectiveness of the intelligent tracking error prediction method and the excellent performance of the control strategy for high-precision tracking of high-frequency reference trajectories are validated through experimental investigations on a self-made piezoelectric-actuated stage.
IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS
(2023)
Article
Instruments & Instrumentation
Tiantian Sun, Yue Wang, Peng Yan
Summary: This study investigates a voltage sequence-based step analysis and variable step control strategy for a bidirectional complementary-type inchworm actuator, achieving bidirectional variable step motion without sacrificing loading capacity, and improving nanopositioning speed. Real-time control experiments demonstrate a bidirectional variable step motion range of +/- 22 µm can be achieved by controlling input signals, with an adjustable total clamping force for enhanced motion stability and loading capacity in variable step motion.
SMART MATERIALS AND STRUCTURES
(2021)
Article
Automation & Control Systems
Kanghong Shi, Nastaran Nikooienejad, Ian R. Petersen, S. O. Reza Moheimani
Summary: This article proposes a new approach to solve the control problem for negative imaginary systems using hybrid integrator-gain systems. The single HIGS, multi-HIGS, and cascade of two HIGSs are shown to be nonlinear NI systems that can be used as controllers to stabilize linear NI systems. The results are illustrated in a real-world experiment using a 2-DOF MEMS nanopositioner stabilized by a multi-HIGS.
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
(2023)
Review
Engineering, Mechanical
Chen Yang, Kamal Youcef-Toumi
Summary: This article reviews the key technology and challenges of nanopositioning, focusing on the charge control strategy that overcomes the nonlinearity of piezo-actuators. Through comparison with other control methods, the practical value of charge control is further clarified, and new research opportunities are highlighted.
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
(2022)
Article
Automation & Control Systems
Nastaran Nikooienejad, Mohammad Maroufi, S. O. Reza Moheimani
Summary: A control scheme for video-rate atomic force microscopy with rosette pattern is proposed, utilizing a feedback internal-model-based controller and a feedforward iterative learning controller to enhance tracking performance and reject repetitive disturbances. Two inversion techniques for constructing the learning filter are investigated, showing that the iterative learning controller significantly reduces both transient and steady-state tracking errors. High-resolution time-lapsed video-rate AFM images with the rosette pattern are successfully acquired and reported.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2021)
Article
Automation & Control Systems
Aleksandra Mitrovic, William S. Nagel, Kam K. Leang, Garrett M. Clayton
Summary: This article presents a closed-loop control framework for dual-stage nanopositioning systems, allowing control efforts to be allocated based on the range capabilities of individual actuators. The focus is on range-based control methods and addressing control issues when sensor measurements are only available from the total output of the system. The study shows significant improvement in tracking accuracy using the proposed range-based control structure compared to frequency-based methods.
IEEE-ASME TRANSACTIONS ON MECHATRONICS
(2021)
Article
Automation & Control Systems
Chen Yang, Yi Wang, Kamal Youcef-Toumi
Summary: This article presents a novel hierarchical antidisturbance control solution for nanopositioning stages driven by piezoelectric actuator. The proposed strategy integrates three antidisturbance components into a single framework, improving response time and loosening bandwidth constraint.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
(2022)
Article
Engineering, Multidisciplinary
Saeid Bashash
Summary: This paper presents a new approach for designing polynomial-based reference and feedforward control trajectories for high precision control of flexible servo actuators. A robust frequency-domain controller is first designed for reference tracking and disturbance rejection, and polynomial trajectories are derived based on a simplified rigid body representation. Feedforward notch filters are proposed to avoid exciting the system's resonant modes. Simulation results show that the proposed scheme significantly improves the system's performance compared to conventional methods.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2023)
Article
Multidisciplinary Sciences
Huan Feng, Hongbo Zhou, Congmei Jiang, Aiping Pang
Summary: This paper proposes a structured H∞ design to address the issues of accuracy and robustness caused by the weakly damped resonant modes and model uncertainty in a piezoelectric nanopositioning platform. A two-loop control structure is used, with an H∞ optimization matrix containing multi-dimensional performance decoupling outputs and an inner damping controller set according to the resonant modes' damping. Simulation experiments demonstrate that the designed structured H∞ controller achieves higher tracking accuracy and robustness compared to other controllers, meeting multiple performance requirements and showing suitability for engineering practice applications.
Article
Robotics
Azadeh Doroudchi, Roozbeh Khodambashi, Mohammad Sharifzadeh, Dongting Li, Spring Berman, Daniel M. Aukes
Summary: This study demonstrates closed-loop trajectory tracking control of a millimeter-scale, two degree-of-freedom manipulator using temperature-responsive hydrogel actuators. An Observer-based controller and a robust H-infinity-optimal controller are proposed and the latter is shown to be more accurate and robust in tracking elliptical trajectories in simulation and experimental scenarios. Additionally, the H-infinity-optimal controller is capable of tracking different trajectories with high accuracy even under heavy loads, showcasing its potential for practical applications like payload transport.
IEEE ROBOTICS AND AUTOMATION LETTERS
(2021)
Article
Automation & Control Systems
Farid Tajaddodianfar, S. O. Reza Moheimani, John N. Randall
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
(2019)
Article
Automation & Control Systems
M. Bulut Coskun, Hamed Alemansour, Anthony G. Fowler, Mohammad Maroufi, S. O. Reza Moheimani
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
(2019)
Article
Instruments & Instrumentation
Nastaran Nikooienejad, Mohammad Maroufi, S. O. Reza Moheimani
REVIEW OF SCIENTIFIC INSTRUMENTS
(2019)
Article
Instruments & Instrumentation
Afshin Alipour, M. Bulut Coskun, S. O. Reza Moheimani
REVIEW OF SCIENTIFIC INSTRUMENTS
(2019)
Article
Automation & Control Systems
Nastaran Nikooienejad, Afshin Alipour, Mohammad Maroufi, S. O. Reza Moheimani
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
(2020)
Article
Engineering, Electrical & Electronic
Mohammad Mahdavi, M. Bulut Coskun, S. O. Reza Moheimani
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2020)
Article
Engineering, Electrical & Electronic
Mohammad Mahdavi, Nastaran Nikooienejad, S. O. Reza Moheimani
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2020)
Article
Engineering, Electrical & Electronic
Afshin Alipour, M. Bulut Coskun, S. O. Reza Moheimani
Summary: The slow Z-axis dynamics of Scanning Tunneling Microscopes (STMs) are often due to the limitations of piezotube nanopositioners, which restrict the overall bandwidth to about 1 kHz. This paper introduces a microfabrication process to develop a MEMS nanopositioner with a tenfold increase in bandwidth, demonstrating improved response to sample topography changes. Additionally, a novel electrical isolation technique allows for potential applications in parallelism, showcasing the device's capability to replace the Z-axis of STMs.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2021)
Article
Engineering, Electrical & Electronic
Hamed Alemansour, S. O. Reza Moheimani, James H. G. Owen, John N. Randall, Ehud Fuchs
Summary: This paper utilizes a modification to the STM feedback control loop to achieve high quality imaging, as well as developing a new technique to simultaneously acquire STS data.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2021)
Article
Engineering, Electrical & Electronic
Afshin Alipour, S. O. Reza Moheimani, James H. G. Owen, Ehud Fuchs, John N. Randall
Summary: This article presents a hybrid system in which a MEMS nanopositioner is used to replace the Z axis of a conventional UHV STM, resulting in higher sensitivity and a smaller footprint. Experimental results demonstrate that this on-chip STM is conducive to atomic precision scanning under UHV conditions.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2021)
Editorial Material
Automation & Control Systems
S. O. R. Moheimani
Article
Instruments & Instrumentation
Hazhir Mahmoodi Nasrabadi, Mohammad Mahdavi, Mohammadreza Soleymaniha, S. O. Reza Moheimani
Summary: Active microcantilevers with on-chip sensing and actuation have significant advantages in tapping mode Atomic Force Microscopy (AFM). This study investigates the noise sources that affect AFM microcantilevers with collocated aluminum nitride (AlN) actuator-sensor pairs and presents a high signal-to-noise ratio (SNR) sensing method that enables high-resolution AFM.
REVIEW OF SCIENTIFIC INSTRUMENTS
(2022)
Proceedings Paper
Engineering, Electrical & Electronic
Mohammadreza Soleymaniha, M. Bulut Coskun, Hazhir Mahmoodi Nasrabadi, Afshin Alipour, S. O. Reza Moheimani
Summary: This paper presents an AFM cantilever array with three active microcantilevers for parallel imaging in tapping mode. The cantilevers are equipped with on-chip piezoelectric actuation/sensing elements and an electrothermal actuator for z-axis positioning. By designing the cantilevers with different dimensions to have distinct resonant frequencies, vibrational coupling is minimized and electrical cross-coupling is successfully mitigated, allowing for obtaining three tapping mode AFM images through subsequent use of the cantilevers in the array.
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)
(2021)
Article
Engineering, Electrical & Electronic
Hamed Alemansour, S. O. Reza Moheimani, James H. G. Owen, John N. Randall, Ehud Fuchs
Summary: By changing the feedback loop and introducing a high-frequency dither voltage, alongside notch filters, the quality of dI/dV images obtained by STM can be significantly improved, enabling higher resolution surface imaging.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
(2021)
Proceedings Paper
Computer Science, Artificial Intelligence
Nastaran Nikooienejad, Afshin Alipour, Mohammad Maroufi, S. O. Reza Moheimani
2018 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM)
(2018)
