Highly Efficient Passive Thermal Micro-Actuator

Title
Highly Efficient Passive Thermal Micro-Actuator
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 6, Pages 1981-1988
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-08-01
DOI
10.1109/jmems.2015.2457094

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