A microcantilever system with slider-crank actuation mechanism

Published 2015 View Full Article

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Title
A microcantilever system with slider-crank actuation mechanism
Authors
Keywords
Microcantilever, Slider-crank mechanism, Flexure hinge, Big deflection, Sharp tip, Electrothermal actuator
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 226, Issue -, Pages 59-68
Publisher
Elsevier BV
Online
2015-02-26
DOI
10.1016/j.sna.2015.02.029

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