Dynamic response modelling and characterization of a vertical electrothermal actuator

Published 2009 View Full Article

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Title
Dynamic response modelling and characterization of a vertical electrothermal actuator
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 075014
Publisher
IOP Publishing
Online
2009-06-24
DOI
10.1088/0960-1317/19/7/075014
References
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