MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature
Published 2011 View Full Article
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Title
MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature
Authors
Keywords
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Journal
EXPERIMENTAL MECHANICS
Volume 52, Issue 6, Pages 607-617
Publisher
Springer Nature
Online
2011-07-21
DOI
10.1007/s11340-011-9526-8
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