☆ 4.7 Article

Design and characterization of a fully compliant out-of-plane thermal actuator

SENSORS AND ACTUATORS A-PHYSICAL (2012)

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Journal

SENSORS AND ACTUATORS A-PHYSICAL
Volume 183, Issue -, Pages 95-100

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2012.05.028

Keywords

Surface micro-machining; Thermal actuators

Categories

Engineering, Electrical & Electronic Instruments & Instrumentation

Funding

  1. INVAP S.E.
  2. ANPCyT [PAE 2006 37063 - PID 137]

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This paper presents the design and characterization of an out-of-plane thermal actuator. The design optimizes the vertical displacement by concentrating elastic deformations in localized hinges allowing a full thermal expansion of the actuator arms. Heating is provided by joule dissipation in the actuator itself. A testing device was fabricated using the Memscap PolyMUMPs process. Characterization of the sensor was performed by white light optical profilometry for varying electric biasing and different atmospheres. The presented design has the advantage that the moving direction of the actuator can be determined by the relative location of the hinges. (C) 2012 Elsevier By. All rights reserved.

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