Thermal cycle modeling of electrothermal microactuators

Title
Thermal cycle modeling of electrothermal microactuators
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 152, Issue 2, Pages 192-202
Publisher
Elsevier BV
Online
2009-04-03
DOI
10.1016/j.sna.2009.03.015

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