Article
Chemistry, Physical
Mikhail A. Kanygin, Behraad Bahreyni
Summary: The article demonstrates a method of using an optical signal to modulate internal mechanical strain in regular p-n junctions to generate displacements in microstructures, showing a significant increase in displacement compared to noise-excited systems. The actuators can be controlled remotely by varying light intensity without a local energy supply, and the method can be implemented in mainstream manufacturing processes.
Article
Engineering, Electrical & Electronic
Yingli Shi, Chao Zhou, Zibo Cao, Yurong He, Jingwen Guo, Chunxin Li, Qianhong Wu, Kui Liang, Yanzhao Li, Yuan Lin
Summary: This paper presents a design and manufacturing method of a flexible radio-frequency microelectromechanical system switch, which can be used in satellite communication. Through simulation analysis, it is found that the switch can maintain RF performance at certain bending radius. It is demonstrated that the switch is insensitive to bending deformation and has stable RF performance.
NPJ FLEXIBLE ELECTRONICS
(2022)
Article
Chemistry, Analytical
Marian Gilewski
Summary: This article discusses the application considerations in the optical sensor of a micro-electro-mechanical system (MEMS). The analysis provided is limited to application issues encountered in research or industrial applications. The article focuses on a case where the sensor is used as a feedback signal source to stabilize the flux of an LED lamp. The main challenge in using such sensors is the conditioning of the output analog signal for further digital processing.
Article
Physics, Applied
C. Morelle, D. Theron, I. Roch-Jeune, P. Tilmant, E. Okada, F. Vaurette, B. Grimbert, J. Derluyn, S. Degroote, M. Germain, M. Faucher
Summary: We present an accelerometer micro-sensor utilizing epitaxial gallium nitride and silicon. The device consists of a vibrating beam accelerometer fabricated using micro-electro-mechanical-system technology on an AlGaN/GaN heterostructure grown on a silicon substrate. The vibrating GaN beam incorporates high electron mobility transducers, while a high aspect ratio proof mass is engineered in the silicon substrate. Our research investigates the sensor response in various modes, showing a scale factor of up to 160 Hz/g, which exhibits an unconventional dependence on the mode number. To explain this, we propose an analytical model considering the built-in stress during epitaxy. This proof-of-concept device opens up possibilities for inertial sensors utilizing the properties of GaN.
APPLIED PHYSICS LETTERS
(2023)
Article
Engineering, Electrical & Electronic
Michael G. Ruppert, Andrew J. Fleming, Yuen K. Yong
Summary: This study proposes a hybrid cantilever design with integrated piezoelectric actuators and piezoresistive sensors, which can overcome the current limitations of active microcantilevers and be fabricated using a commercial MEMS fabrication process.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Chemistry, Physical
Mohammad Alzgool, Mohammad Mousavi, Benyamin Davaji, Shahrzad Towfighian
Summary: This work demonstrates zero-power shock sensing using a micro-triboelectric generator and MEMS electrostatic actuator system. The generator converts mechanical shock into voltage, which is then utilized to actuate a MEMS switch. Through the integration of MEMS technology, the fabrication process of a Triboelectric-Nano-Generator (TENG) is presented for the first time. The TENG shows the ability to provide a voltage difference of up to 0.4V at 2.3g acceleration and successfully actuates a cantilevered MEMS switch.
Review
Chemistry, Analytical
Giorgio De Pasquale
Summary: Additive manufacturing (AM) processes at the micrometer range are undergoing intense development recently, with efforts to integrate them with traditional MEMS fabrication processes and to develop specific design methods for this field. Despite the abundance of documentation on process attempts, setup details, and case studies, organized analysis of the specific and comparative advantages, constraints, and limitations of AM methods for microstructures is necessary due to the diverse variety of processes and materials.
Review
Chemistry, Analytical
Yoo-Kyum Shin, Yujin Shin, Jung Woo Lee, Min-Ho Seo
Summary: This article summarizes recent advances in micro/nano-structured biodegradable pressure sensor devices, focusing on significant improvements in device-level performance and functionality achieved by adjusting geometrical design parameters at the micro- and nano-meter scale.
Review
Multidisciplinary Sciences
Ida Hamidah, Roer Eka Pawinanto, Budi Mulyanti, Jumril Yunas
Summary: The research on MEMS energy harvester has been rapidly growing, with a focus on analyzing the impact of research activities in the field. The study identified China as the leading country in conducting projects related to MEMS energy harvesters, while the Journal of MEMS and Journal of Micromechanics and Microengineering are the top journals publishing reports on research progress in this area. The analysis highlights potential future research areas, including the use of new materials, new structures, and optimization of vibration concepts for MEMS energy harvesters.
Article
Engineering, Electrical & Electronic
T. Arnoult, C. Leclercq, C. Ghouila-Houri, A. Mazzamurro, R. Viard, E. Garnier, C. Poussot-Vassal, A. Merlen, D. Sipp, P. Pernod, A. Talbi
Summary: Flow control involves modifying the natural state of flow to achieve a more favorable state with reduced drag or noise radiation. This paper presents open-loop flow control experiments on a subsonic open-cavity flow, where the focus is on modifying flow fluctuations instead of mean flow properties. To achieve this, a linear array of Micro Magneto-Electro-Mechanical Systems actuators was implemented to perform the experiments. The results showed significant reduction in cavity oscillation and sound pressure level, indicating the potential for closed-loop control of the open-cavity flow.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Engineering, Mechanical
Kunpeng Zhang, Jia Zhu, Shuying Hao, Qichang Zhang, Jingjing Feng
Summary: This paper presents a T-beam resonator with a piezoelectric structure for use in a T-beam micro-gyroscope. The gyroscope operates with a hybrid electrostatic-piezoelectric driving, and the sensing and driving modes are designed to have a 1:2 frequency ratio with two-to-one internal resonance. The results show that the gyroscope's response bandwidth is significantly improved by the internal resonance, and the hybrid-driving increases the input energy of the gyroscope, leading to improved performance in both vacuum and non-vacuum environments.
NONLINEAR DYNAMICS
(2023)
Article
Computer Science, Artificial Intelligence
Ardashir Mohammadzadeh, Reza Hadjiaghaie Vafaie
Summary: This study proposes a new fuzzy logic controller for MEMS gyroscopes, utilizing deep learning and optimization to address nonlinearities and unknown dynamics, demonstrating superior performance through multiple simulations and comparisons.
APPLIED SOFT COMPUTING
(2021)
Article
Engineering, Electrical & Electronic
Zhixin A. Ye, Sergio F. Almeida, Urmita Sikder, Xiaoer Hu, Tsegereda K. Esatu, Kathy Le, Jaeseok Jeon, Tsu-Jae King Liu
Summary: Micro-electro-mechanical relays with multiple gate electrodes, operated with a tunable body bias voltage, are investigated for more compact and energy-efficient implementation of digital logic circuits. Specifically, it is demonstrated that a relay design with three gate electrodes of equal area is capable of performing different digital logic functions by adjusting the body bias voltage.
IEEE ELECTRON DEVICE LETTERS
(2021)
Article
Engineering, Mechanical
Lisa Schmitt, Peter Conrad, Alexander Kopp, Christoph Ament, Martin Hoffmann
Summary: In this paper, various microelectromechanical systems based on electrostatic actuators are presented, showcasing their ability to achieve large and stepwise displacements through cooperative functions. The introduction of micro-stepper actuators, with or without guiding spring mechanisms, allows for a comparison of different designs to increase actuator displacement. Cascaded actuators are also explored as micromechanical digital-to-analog converters, reducing complexity compared to analog stepper-actuators. Additionally, systems utilizing droplet-based bearings on arrays of aluminum electrodes are discussed for even larger displacements, providing new applications for springless large displacement stepper-actuators.
Article
Engineering, Electrical & Electronic
Yash Raj, Kaushik Shukla, Tanmoy Datta, Mrinal Sen
Summary: Geophysical phenomena such as volcanic eruptions, tectonic plate movements, and earthquakes have a direct impact on the region's gravity, which can be measured and analyzed to study these activities quantitatively. This study introduces a novel on-chip micro-cantilever-based optical gravimeter for precise measurement of gravitational changes, demonstrating a wide reading range, high resolution, and sensitivity.
IEEE SENSORS JOURNAL
(2021)
