Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods

Title
Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods
Authors
Keywords
-
Journal
COMPUTERS IN INDUSTRY
Volume 152, Issue -, Pages 104005
Publisher
Elsevier BV
Online
2023-08-08
DOI
10.1016/j.compind.2023.104005

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