Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods
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Title
Development of taxonomy for classifying defect patterns on wafer bin map using Bin2Vec and clustering methods
Authors
Keywords
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Journal
COMPUTERS IN INDUSTRY
Volume 152, Issue -, Pages 104005
Publisher
Elsevier BV
Online
2023-08-08
DOI
10.1016/j.compind.2023.104005
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- Bin2Vec: A Better Wafer Bin Map Coloring Scheme for Comprehensible Visualization and Effective Bad Wafer Classification
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- Classification of mixed-type defect patterns in wafer bin maps using convolutional neural networks
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- (2018) Takeshi Nakazawa et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- Decision Tree Ensemble-Based Wafer Map Failure Pattern Recognition Based on Radon Transform-Based Features
- (2018) Minghao Piao et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing
- (2017) Kouta Nakata et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- Wafer Map Defect Detection and Recognition Using Joint Local and Nonlocal Linear Discriminant Analysis
- (2016) Jianbo Yu et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps
- (2015) Fatima Adly et al. IEEE Transactions on Industrial Informatics
- Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets
- (2015) Ming-Ju Wu et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
- A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
- (2013) Chen-Fu Chien et al. INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
- An intelligent system for wafer bin map defect diagnosis: An empirical study for semiconductor manufacturing
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- Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes
- (2011) Tao Yuan et al. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
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- (2011) Gyunghyun Choi et al. INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
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- (2008) Chih-Hsuan Wang EXPERT SYSTEMS WITH APPLICATIONS
- Defect spatial pattern recognition using a hybrid SOM–SVM approach in semiconductor manufacturing
- (2007) Te-Sheng Li et al. EXPERT SYSTEMS WITH APPLICATIONS
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