A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence

Published 2013 View Full Article

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Title
A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
Volume 51, Issue 8, Pages 2324-2338
Publisher
Informa UK Limited
Online
2013-03-01
DOI
10.1080/00207543.2012.737943
References
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