An intelligent system for wafer bin map defect diagnosis: An empirical study for semiconductor manufacturing

Published 2012 View Full Article

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Title
An intelligent system for wafer bin map defect diagnosis: An empirical study for semiconductor manufacturing
Authors
Keywords
-
Journal
ENGINEERING APPLICATIONS OF ARTIFICIAL INTELLIGENCE
Volume 26, Issue 5-6, Pages 1479-1486
Publisher
Elsevier BV
Online
2012-12-24
DOI
10.1016/j.engappai.2012.11.009

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