A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing

Published 2017 View Full Article

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Title
A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 30, Issue 4, Pages 339-344
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-09-19
DOI
10.1109/tsm.2017.2753251

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