Decision Tree Ensemble-Based Wafer Map Failure Pattern Recognition Based on Radon Transform-Based Features

Published 2018 View Full Article

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Title
Decision Tree Ensemble-Based Wafer Map Failure Pattern Recognition Based on Radon Transform-Based Features
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 31, Issue 2, Pages 250-257
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-02-17
DOI
10.1109/tsm.2018.2806931

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