Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps

Title
Simplified Subspaced Regression Network for Identification of Defect Patterns in Semiconductor Wafer Maps
Authors
Keywords
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Journal
IEEE Transactions on Industrial Informatics
Volume 11, Issue 6, Pages 1267-1276
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-09-25
DOI
10.1109/tii.2015.2481719

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