Wafer map defect recognition based on deep transfer learning-based densely connected convolutional network and deep forest

Title
Wafer map defect recognition based on deep transfer learning-based densely connected convolutional network and deep forest
Authors
Keywords
Semiconductor manufacturing, Wafer map defect, Transfer learning, Convolution neural network, Deep forest
Journal
Publisher
Elsevier BV
Online
2021-08-18
DOI
10.1016/j.engappai.2021.104387

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