Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification

Published 2020 View Full Article

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Title
Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 33, Issue 2, Pages 258-266
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-02-20
DOI
10.1109/tsm.2020.2974867

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