Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
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Title
Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
Authors
Keywords
Subsurface defects, Surface morphology, Hydrogen plasma etching, Electrical property, Single crystal diamond
Journal
VACUUM
Volume 199, Issue -, Pages 110932
Publisher
Elsevier BV
Online
2022-02-03
DOI
10.1016/j.vacuum.2022.110932
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