Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS

Published 2020 View Full Article

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Title
Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS
Authors
Keywords
Etching, Hydrogen plasma, MEMS/NEMS, Single crystal diamond, Resonance frequency shift
Journal
CORROSION SCIENCE
Volume 170, Issue -, Pages 108651
Publisher
Elsevier BV
Online
2020-04-09
DOI
10.1016/j.corsci.2020.108651

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