Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor

Published 2015 View Full Article

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Title
Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor
Authors
Keywords
Single crystal diamond, Hydrogen etching, Etching rates, Activation energy
Journal
MATERIALS LETTERS
Volume 151, Issue -, Pages 115-118
Publisher
Elsevier BV
Online
2015-04-01
DOI
10.1016/j.matlet.2015.03.073

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