Impact of deposition temperature on microstructure and properties of erbium oxide antireflective films deposited on CVD diamond substrates
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Title
Impact of deposition temperature on microstructure and properties of erbium oxide antireflective films deposited on CVD diamond substrates
Authors
Keywords
CVD diamond, Erbium oxide antireflective films, Microstructure, Composition, Properties
Journal
VACUUM
Volume 193, Issue -, Pages 110547
Publisher
Elsevier BV
Online
2021-08-26
DOI
10.1016/j.vacuum.2021.110547
References
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