Atomic-scale and damage-free polishing of single crystal diamond enhanced by atmospheric pressure inductively coupled plasma
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Title
Atomic-scale and damage-free polishing of single crystal diamond enhanced by atmospheric pressure inductively coupled plasma
Authors
Keywords
Diamond polishing, Damage-free surface, ICP enhanced polishing, Atomic surface, OH radicals
Journal
CARBON
Volume 182, Issue -, Pages 175-184
Publisher
Elsevier BV
Online
2021-06-03
DOI
10.1016/j.carbon.2021.05.062
References
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